Design and development of low activation energy based...

Microelectronic Engineering 2016 / 10 Vol. 164

Design and development of low activation energy based nonchemically amplified resists (n-CARs) for next generation EUV lithography

Sharma, Satinder K., Pal, Satyendra Prakash, Reddy, Pulikanti Guruprasad, Kumar, Pawan, Ghosh, Subrata, Gonsalves, Kenneth E.
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Volume:
164
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.07.017
Date:
October, 2016
File:
PDF, 2.13 MB
english, 2016
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