Deep submicron parallel scanning probe lithography using two-degree-of-freedom microelectromechanical systems actuators with integrated nanotips
Mehdizadeh, Emad, Pourkamali, SiavashVolume:
9
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2014.0272
Date:
October, 2014
File:
PDF, 518 KB
english, 2014