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[IEEE 2016 28th International Symposium on Power Semiconductor Devices and ICs (ISPSD) - Prague, Czech Republic (2016.6.12-2016.6.16)] 2016 28th International Symposium on Power Semiconductor Devices and ICs (ISPSD) - Implementation of high density embedded 3-dimensional MIM capacitor integrated in compatible logic process
Hwang, Jaeho, Lee, Sanghyun, Hwang, Jongtaek, Ro, Kyoungwook, Lee, Sanghyun, Lee, Jaehee, Lee, DerekYear:
2016
Language:
english
DOI:
10.1109/ispsd.2016.7520870
File:
PDF, 849 KB
english, 2016