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Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units
Haddad, Bashar M., Yang, Sen, Karam, Lina J., Ye, Jieping, Patel, Nital S., Braun, Martin W.Year:
2016
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2016.2594288
File:
PDF, 3.75 MB
english, 2016