Ultraclean wafer-level vacuum-encapsulated silicon ring resonators for timing and frequency references
Xereas, George, Chodavarapu, Vamsy P.Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.035004
Date:
September, 2016
File:
PDF, 3.68 MB
english, 2016