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Reaction Process of Titanium Tetrachloride with Ammonia in the Vapor Phase and Properties of the Titanium Nitride Formed
Saeki, Yuzo, Matsuzaki, Ryoko, Yajima, Akimasa, Akiyama, MasayoVolume:
55
Journal:
Bulletin of the Chemical Society of Japan
DOI:
10.1246/bcsj.55.3193
Date:
October, 1982
File:
PDF, 814 KB
1982