A New Three-Component Photoresist Based on Calix[4]resorcinarene Derivative, a Cross-linker, and a Photo-acid Generator
Nakayama, Tomonari, Nomura, Masayoshi, Haga, Kohji, Ueda, MitsuruVolume:
71
Journal:
Bulletin of the Chemical Society of Japan
DOI:
10.1246/bcsj.71.2979
Date:
December, 1998
File:
PDF, 1.15 MB
1998