A Negative-Working Alkaline Developable Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator
Nakayama, Tomonari, Haga, Kohji, Haba, Osamu, Ueda, MitsuruVolume:
26
Journal:
Chemistry Letters
DOI:
10.1246/cl.1997.265
Date:
March, 1997
File:
PDF, 472 KB
1997