Low-temperature formation of self-assembled Ge quantum dots...

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Low-temperature formation of self-assembled Ge quantum dots on Si(100) under high carbon mediation via solid-phase epitaxy

Itoh, Yuhki, Takeshima, Kaito, Kawashima, Tomoyuki, Washio, Katsuyoshi
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Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.09.011
Date:
September, 2016
File:
PDF, 1.13 MB
english, 2016
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