Novel Electron-Beam Molecular Resists with High Resolution...

Novel Electron-Beam Molecular Resists with High Resolution and High Sensitivity for Nanometer Lithography

Kadota, Toshiaki, Kageyama, Hiroshi, Wakaya, Fujio, Gamo, Kenji, Shirota, Yasuhiko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
33
Language:
english
Journal:
Chemistry Letters
DOI:
10.1246/cl.2004.706
Date:
June, 2004
File:
PDF, 187 KB
english, 2004
Conversion to is in progress
Conversion to is failed