Wafer-Level Vacuum Encapsulated Breath-Mode Ring Resonator Fabricated in a Commercial MEMS Process
Xereas, George, Chodavarapu, VamsyLanguage:
english
Journal:
Electronics Letters
DOI:
10.1049/el.2016.1226
Date:
September, 2016
File:
PDF, 898 KB
english, 2016