Wafer-Level Vacuum Encapsulated Breath-Mode Ring Resonator...

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Wafer-Level Vacuum Encapsulated Breath-Mode Ring Resonator Fabricated in a Commercial MEMS Process

Xereas, George, Chodavarapu, Vamsy
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Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el.2016.1226
Date:
September, 2016
File:
PDF, 898 KB
english, 2016
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