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SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanoengineering: Fabrication, Properties, Optics, and Devices XIII - Nanofabrication of low extinction coefficient and high-aspect-ratio Si structures for metaphotonic applications
Campo, Eva M., Dobisz, Elizabeth A., Eldada, Louay A., Lee, JeongYub, Song, Byonggwon, Kim, Jaekwan, Lee, Chang-Won, Han, Seunghoon, Baik, Chan-Wook, Jeong, Heejeong, Kim, Yongsung, Lee, Chang SeungVolume:
9927
Year:
2016
Language:
english
DOI:
10.1117/12.2235523
File:
PDF, 2.30 MB
english, 2016