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(Invited) Deep Silicon Etching - Increasingly Relevant >20 Years on!
Thomas, D., Muggeridge, M., Hopkins, J., Launay, N., Ashraf, H., Barrass, T.Volume:
72
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07219.0009ecst
Date:
September, 2016
File:
PDF, 776 KB
english, 2016