Preparation of Cu Thin Films by the Decomposition of Copper...

Bulletin of the Chemical Society of Japan 1992 / 03 Vol. 65; Iss. 3

Preparation of Cu Thin Films by the Decomposition of Copper Acetylacetonate on Catalytically Active Substrate Surfaces

Miura, Hiroshi, Oki, Kazuo, Ochiai, Hisayoshi, Higuchi, Hiroshi, Terasaka, Michio, Matsuda, Tsuneo
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Volume:
65
Journal:
Bulletin of the Chemical Society of Japan
DOI:
10.1246/bcsj.65.892
Date:
March, 1992
File:
PDF, 807 KB
1992
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