Oscillatory Behavior in Electrochemical Deposition Reaction of Polycrystalline Silicon Thin Films through Reduction of Silicon Tetrachloride in a Molten Salt Electrolyte
Matsuda, Toshihiko, Nakamura, Shinsuke, Ide, Ken-ichiro, Nyudo, Kazuiku, Yae, Shinji, Nakato, YoshihiroVolume:
25
Journal:
Chemistry Letters
DOI:
10.1246/cl.1996.569
Date:
July, 1996
File:
PDF, 423 KB
1996