Plasma-Enhanced Atomic Layer Deposition of Iron and...

ECS Transactions 2016 / 09 Vol. 75; Iss. 6

Plasma-Enhanced Atomic Layer Deposition of Iron and Titanium Phosphates as Electrode Materials for 3D-Structured Lithium-Ion Microbatteries

Dobbelaere, T., Mattelaer, F., Dendooven, J., Vereecken, P. M., Detavernier, C.
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Volume:
75
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07506.0035ecst
Date:
September, 2016
File:
PDF, 733 KB
english, 2016
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