Atmospheric pressure roll-to-roll plasma enhanced CVD of...

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Plasma Processes and Polymers 2016 / 09

Atmospheric pressure roll-to-roll plasma enhanced CVD of high quality silica-like bilayer encapsulation films

Elam, Fiona M., Starostin, Sergey A., Meshkova, Anna S., van der Velden-Schuermans, Bernadette C. A. M., Bouwstra, Jan B., van de Sanden, Mauritius C. M., de Vries, Hindrik W.
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Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201600143
Date:
September, 2016
File:
PDF, 7.48 MB
english, 2016
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