Al2O3/β-Ga2O3 (-201) Interface Improvement through Piranha...

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IEEE Electron Device Letters 2016

Al2O3/β-Ga2O3 (-201) Interface Improvement through Piranha Pretreatment and Post Deposition Annealing

Zhou, Hong, Alghamdi, Sami, Si, Mengwei, Qiu, Gang, Ye, Peide
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Year:
2016
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2016.2609202
File:
PDF, 696 KB
english, 2016
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