Improvement of Al-Polar AlN Layer Quality by Three-Stage...

Applied Physics Express 2008 / 2 Vol. 1

Improvement of Al-Polar AlN Layer Quality by Three-Stage Flow-Modulation Metalorganic Chemical Vapor Deposition

Takeuchi, Misaichi, Ooishi, Shin, Ohtsuka, Takumi, Maegawa, Tomohiro, Koyama, Takahiro, Chichibu, Shigefusa F., Aoyagi, Yoshinobu
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Volume:
1
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.021102
Date:
February, 2008
File:
PDF, 349 KB
english, 2008
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