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Using Ray Tracing Simulations for Direct Determination of Burgers Vectors of Threading Mixed Dislocations in 4H-SiC c-Plane Wafers Grown by PVT Method
Guo, Jian Qiu, Yang, Yu, Wu, Fang Zhen, Sumakeris, Joseph J., Leonard, R.T., Goue, O.Y., Raghothamachar, Balaji, Dudley, MichaelVolume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.858.15
Date:
May, 2016
File:
PDF, 666 KB
english, 2016