Enhanced Nucleation of High-k Dielectrics on Graphene by...

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Chemistry of Materials 2016 / 09

Enhanced Nucleation of High-k Dielectrics on Graphene by Atomic Layer Deposition

Park, Yong Hyun, Kim, Mi Hye, Kim, Soo Bin, Jung, Hae Jun, Chae, Kwanbyung, Ahn, Yeong Hwan, Park, Ji-Yong, Rotermund, Fabian, Lee, Sang Woon
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Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b02486
Date:
September, 2016
File:
PDF, 1.69 MB
english, 2016
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