Evolution of Threading Edge Dislocations at Earlier Stages...

Materials Science Forum 2016 / 5 Vol. 858

Evolution of Threading Edge Dislocations at Earlier Stages of PVT Growth for 4H-SiC Single Crystals

Tani, Komomo, Fujimoto, Tatsuo, Kamei, Kazuhito, Kusunoki, Kazuhiko, Seki, Kazuaki, Yano, Takayuki
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Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.858.73
Date:
May, 2016
File:
PDF, 4.40 MB
english, 2016
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