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SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Electronics and MEMS II - Enhancement of spatial resolution of microfabricated columns using localized electrochemical deposition
Choo, Jian H., Abbott, Derek, Varadan, Vijay K., Yeo, SweeHock, Boehringer, Karl F.Volume:
4236
Year:
2000
Language:
english
DOI:
10.1117/12.418765
File:
PDF, 1.06 MB
english, 2000