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Heterogeneous sensors of pressure sensor and ultraviolet photodetector fabricated by vertical 3D stacking as multi-functional device
Hsueh, Han-Ting, Lai, L. T., Juan, Yen-Ming, Huang, Shih-Wei, Cheng, Tsung-Chieh, Lin, Yu-DeYear:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C6RA23377E
File:
PDF, 1.56 MB
english, 2016