[NanoScience and Technology] Helium Ion Microscopy || Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale
Hlawacek, Gregor, Gölzhäuser, ArminVolume:
10.1007/97
Year:
2016
Language:
english
DOI:
10.1007/978-3-319-41990-9_12
File:
PDF, 1.44 MB
english, 2016