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SPIE Proceedings [SPIE Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016 - Wilga, Poland (Sunday 29 May 2016)] Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016 - The influence of annealing on the electrical and optical properties of silicon-rich silicon nitride films
Romaniuk, Ryszard S., Czarnacka, Karolina, Komarov, F. F.Volume:
10031
Year:
2016
Language:
english
DOI:
10.1117/12.2249111
File:
PDF, 1.10 MB
english, 2016