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Effects of dielectric charging on the output voltage of a capacitive accelerometer
Qu, Hao, Yu, Huijun, Zhou, Wu, Peng, Bei, Peng, Peng, He, XiaopingVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/11/115001
Date:
November, 2016
File:
PDF, 982 KB
english, 2016