SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanophotonic Materials XIII - Plasma-enhanced atomic layer deposition for plasmonic TiN
Cabrini, Stefano, Lérondel, Gilles, Schwartzberg, Adam M., Mokari, Taleb, Otto, Lauren M., Hammack, Aaron T., Aloni, Shaul, Ogletree, D. Frank, Olynick, Deirdre L., Dhuey, Scott, Stadler, Bethanie J.Volume:
9919
Year:
2016
Language:
english
DOI:
10.1117/12.2238340
File:
PDF, 904 KB
english, 2016