Modification of SRIM-calculated dose and injected ion...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016 / 11 Vol. 387

Modification of SRIM-calculated dose and injected ion profiles due to sputtering, injected ion buildup and void swelling

Wang, Jing, Toloczko, Mychailo B., Bailey, Nathan, Garner, Frank A., Gigax, Jonathan, Shao, Lin
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Volume:
387
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.09.015
Date:
November, 2016
File:
PDF, 2.66 MB
english, 2016
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