Characterization of Dielectric Charging in MEMS Using...

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Characterization of Dielectric Charging in MEMS Using Diffusive Representation

Atienza, Maria-Teresa, Gorreta, Sergi, Pons-Nin, Joan, Dominguez-Pumar, Manuel
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2016.2612619
File:
PDF, 3.76 MB
english, 2016
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