A numerical study of ultraprecision machining of monocrystalline silicon with laser nano-structured diamond tools by atomistic simulation
Dai, Houfu, Chen, Genyu, Zhou, Cong, Fang, Qihong, Fei, XinjiangLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.10.014
Date:
October, 2016
File:
PDF, 2.24 MB
english, 2016