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A novel correlative model of failure mechanisms for evaluating MEMS devices reliability
Li, Yaqiu, Sun, Yufeng, Hu, Weiwei, Wang, ZiliLanguage:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2016.07.016
Date:
September, 2016
File:
PDF, 1.10 MB
english, 2016