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[IEEE 2016 IEEE Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2016.6.12-2016.6.13)] 2016 IEEE Silicon Nanoelectronics Workshop (SNW) - Activation of high concentrations of phosphorus in germanium by two-steps microwave annealing
Lee, Wen-Hsi, Shih, Tzu-Lang, Lin, Chia-Wei, Chung, Yi-ChenYear:
2016
Language:
english
DOI:
10.1109/SNW.2016.7578003
File:
PDF, 823 KB
english, 2016