![](/img/cover-not-exists.png)
Virtual metrology on semiconductor manufacturing based on Just-in-time learning**This work is a part of the European project ”INTEGRATE”, and carried by STMicroelectronics Fab
Jebri, M.A., El Adel, E.M., Graton, G., Ouladsine, M., Pinaton, J.Volume:
49
Year:
2016
Language:
english
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2016.07.555
File:
PDF, 724 KB
english, 2016