Effect of post annealing on hole mobility of pseudo-single-crystalline germanium films on glass substrates
Kasahara, Kenji, Higashi, Hidenori, Nakano, Mario, Nagatomi, Yuta, Yamamoto, Keisuke, Nakashima, Hiroshi, Hamaya, KoheiLanguage:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.07.004
Date:
August, 2016
File:
PDF, 782 KB
english, 2016