Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2016 / 10 Vol. 384
![](/img/cover-not-exists.png)
Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films
Harayama, I., Nagashima, K., Hirose, Y., Matsuzaki, H., Sekiba, D.Volume:
384
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.07.019
Date:
October, 2016
File:
PDF, 1.32 MB
english, 2016