Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2016 / 10 Vol. 384
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Effect of the energy of recoil atoms on conductivity compensation in moderately doped n-Si and n-SiC under irradiation with MeV electrons and protons
Kozlovski, V.V., Lebedev, A.A., Emtsev, V.V., Oganesyan, G.A.Volume:
384
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.08.003
Date:
October, 2016
File:
PDF, 669 KB
english, 2016