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Atomically smooth gallium nitride surface prepared by chemical-mechanical polishing with S2O82- - Fe2+ based slurry
Shi, Xiaolei, Zou, Chunli, Pan, Guoshun, Gong, Hua, Xu, Li, Zhou, YanLanguage:
english
Journal:
Tribology International
DOI:
10.1016/j.triboint.2016.09.037
Date:
September, 2016
File:
PDF, 2.75 MB
english, 2016