The effect of high concentration of phosphorus in...

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Thin Solid Films 2016 / 6

The effect of high concentration of phosphorus in aluminum-induced crystallization of amorphous silicon films

Hwang, Jun-Dar, Luo, Lee-Chi, Brahma, Sanjaya, Lo, Kuang-Yao
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.05.050
Date:
June, 2016
File:
PDF, 1.46 MB
english, 2016
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