Test Method for Contactless On-Wafer MEMS Characterization...

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IEEE Transactions on Microwave Theory and Techniques 2016

Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring

Linz, Sarah, Oesterle, Florian, Lindner, Stefan, Mann, Sebastian, Weigel, Robert, Koelpin, Alexander
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Microwave Theory and Techniques
DOI:
10.1109/TMTT.2016.2612664
File:
PDF, 2.64 MB
english, 2016
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