Effects of 3D microlens transfer into fused silica...

Applied Surface Science 2017 / 01 Vol. 393

Effects of 3D microlens transfer into fused silica substrate by CF4/O2 dry etching

Grigaliūnas, Viktoras, Jucius, Dalius, Lazauskas, Algirdas, Andrulevičius, Mindaugas, Sakaliūnienė, Jolita, Abakevičienė, Brigita, Kopustinskas, Vitoldas, Smetona, Saulius, Tamulevičius, Sigitas
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Volume:
393
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.10.024
Date:
January, 2017
File:
PDF, 1.52 MB
english, 2017
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