Characteristics of sputter deposited Pt/Al2O3 thin films

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Ceramics International 2016 / 9

Characteristics of sputter deposited Pt/Al2O3 thin films

Cheng, Hsin-Yen, Tzeng, Yonhua, Ting, Jyh-Ming
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Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2016.09.113
Date:
September, 2016
File:
PDF, 833 KB
english, 2016
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