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Influence of the Discharge Mode on the Optical and Passivation Properties of SiNx:H Deposited by PECVD at Atmospheric Pressure
Bazinette, Rémy, Lelièvre, Jean-François, Gaudy, Laura, Massines, FrançoiseVolume:
92
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2016.07.087
Date:
August, 2016
File:
PDF, 448 KB
english, 2016