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Regression Methods for Predicting the Product’s Quality in the Semiconductor Manufacturing Process**This work is part of the European project "INTEGRATE", and carried by ST-microelectronics Fab.
Melhem, Mariam, Ananou, Bouchra, Ouladsine, Mustapha, Pinaton, JacquesVolume:
49
Year:
2016
Language:
english
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2016.07.554
File:
PDF, 1005 KB
english, 2016