Permeation barrier properties of silicon oxide films deposited on polyethylene terephthalate (PET) substrate using roll-to-roll reactive magnetron sputtering system
Bang, S.-H., Hwang, Nong-Moon, Kim, H.-L.Volume:
166
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.09.007
Date:
December, 2016
File:
PDF, 1.66 MB
english, 2016