Fault isolation at P/N junction by nanoprober

Microelectronics Reliability 2016 / 9

Fault isolation at P/N junction by nanoprober

Liu, Wan-Yi, Chiang, Chih-Feng, Yen, Chia-Hsiang, Lin, Rung-Jiun, Chang, Te-Fu, Chang, Shih-Hsin, Kuo, Pau-Sheng, Chu, Chih-Hsun
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Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2016.07.081
Date:
September, 2016
File:
PDF, 656 KB
english, 2016
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