Error-compensating phase-shifting algorithm for surface...

Optics and Lasers in Engineering 2016 / 11 Vol. 86

Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer

Kim, Yangjin, Hibino, Kenichi, Sugita, Naohiko, Mitsuishi, Mamoru
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Volume:
86
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2016.06.021
Date:
November, 2016
File:
PDF, 2.75 MB
english, 2016
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