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Hydrogen microwave plasma treatment of Si and SiO2
Altmannshofer, Stephan, Eisele, Ignaz, Gschwandtner, AlexanderVolume:
304
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.07.038
Date:
October, 2016
File:
PDF, 787 KB
english, 2016