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Formation of WO3 by remote plasma assisted oxidation of tungsten thin films
Al Mohtar, Abeer, Kassem, Wassim, Tabbal, Malek, Roumie, MohamadLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.09.046
Date:
September, 2016
File:
PDF, 804 KB
english, 2016