Application of 9×9 grid gas bags pressure control technology to imprinting of various microstructures
Weng, Yung-Jin, Tsai, JengjanVolume:
127
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2016.06.036
Date:
October, 2016
File:
PDF, 2.21 MB
english, 2016